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2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 1 of 12 product description the kxr94 - 1050 is a tri - axis, silicon micromachined accelerometer with a full - scale output range of +/ - 2g (19.6 m/s/s). the sense element is fabricated using kionixs proprietary plasma micromachining process technology. acceleration sensing is based on the principle of a differential capacitance arising from acceleration - induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. the sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. a separate asic device packaged with the sense element provides signal conditioning and self - test. the accelerometer is del ivered in a 5 x 5 x 1.2 mm dfn plastic package operating from a 2.5 C 5.25v dc supply. there are 4 factory programmable modes of operation for the kxr94: mode 00 C the three outputs (x, y, z) are read through the digital spi interface, which is also use d to command selftest and standby mode. the digital i/o pads are powered from a separate power pin, and will interface to 1.8v logic. mode 01 C the three outputs (x, y, z) are provided on three analog output pins. the kxr94 also features an integrated 3 - c hannel multiplexer (x, y, z). the enable pin must be high for normal operation and low for power shutdown. mode 10 C the three outputs (x, y, z) are provided on three analog output pins. the kxr94 also features an integrated 4 - channel multiplexer (x, y, z , aux in). the enable pin must be high for normal operation and low for power shutdown. mode 11 C the three outputs (x, y, z) are provided on three analog output pins. the kxr94 also features an integrated 4 - channel multiplexer (x, y, z, aux in). the ena ble pin must be low for normal operation and high for power shutdown. the kxr94 - 1050 is factory programmed to be in mode 10.
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 2 of 12 functional diagram c 2 c 3 32 k x sensor charge amplifier oscillator 10 2 self test output x enable vdd gnd 3 8 gnd 12 y sensor charge amplifier 32 k output y z sensor charge amplifier 32 k output z 13 vmux 5 aux in 9 nc s 0 s 1 4 6 7 11 logic c 4 1 khz lpf temp sensor mux 14
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 3 of 12 product specifications table 1. mechanical (specifications are for operation at 2.8v and t = 25c unless stated otherwise) parameters units min typical max operating temperature range o c - 40 - 85 zero - g offset v 1.358 1.4 1.442 zero - g offset variation from rt over temp. mg / o c 0.2 sensitivity mv/g 549 560 571 sens itivity variation from rt over temp. %/ o c 0.01 (xy) 0.02 (z) offset ratiometric error (vdd = 2.8 v 5 %) mg 4 sensitivity ratiometric error (vdd = 2.8 v 5 %) % 1.25 (xy) 0.2 (z) non - linearity % of fs 0.1 cross axis sensitivity % 2 self test output change on activation g 1.3 (xy) 0.35 (z) bandwidth ( - 3db) 1 hz 640 800 960 noise density (on filter pins) ? g / hz 45 notes: 1. internal 1 khz low pass filter. lower frequencies are user definable with ex ternal capacitors.
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 4 of 12 table 2. electrical (specifications are for operation at 2.8v and t = 25c unless stated otherwise) parameters units min typical max supply voltage (v dd ) operating v 2.5 2.8 5.25 current consumption operating ? a 500 950 1400 st andby ? a - 5 analog output resistance(r out ) k ? 24 32 40 input low voltage v - - 0.2 * v io input high voltage v 0.8 * v io - - multiplexer response time ? s 4.5 power up time 1 ms 1 notes: 1. power up time can also be determined by 5 times the r c time constant of the optional user defined low pass filter.
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 5 of 12 table 3. environmental parameters units min target max supply voltage (v dd ) absolute limits v - 0.3 - 7.0 maximum operating temperature range o c - 40 - 125 storage temperature range o c - 55 - 150 mech. shock (powered and unpowered) g - - 5000 for 0.5ms esd hbm v - - 3000 caution: esd sensitive and mechanical shock sensitive component, improper handling can cause permanent damage to the device. this product conforms to directive 2002/95/ec of the european parliament and of the council of the european union (rohs). specifically, this product does not contain lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (pbb), or polybrominated diphenyl ethers (pbd e) above the maximum concentration values (mcv) by weight in any of its homogenous materials. homogenous materials are "of uniform composition throughout." this product is halogen - free per iec 61249 - 2 - 21. specifically, the materials used in this produc t contain a maximum total halogen content of 1500 ppm with less than 900 - ppm bromine and less than 900 - ppm chlorine. soldering soldering recommendations available upon request or from www.kionix.com . hf
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 6 of 12 applicatio n schematic table 4. kxr94 pad descriptions pad name description 1 nc not connected internally (can be connected to vdd or gnd) 2 x output analog output of the x - channel. optionally, a capacitor (c 2 ) placed between th is pin and ground will form a low pass filter. 3 gnd ground 4 aux in auxiliary input for multiplexer. connect to vdd or ground if not used. 5 vmux multiplexed analog output. do not connect if multiplexer is not used. 6 s0 mux selector 0 (see output select table). connect to vdd or ground if not used. 7 s1 mux selector 1 (see output select table). connect to vdd or ground if not used. 8 vdd the power supply input. decouple this pin to ground with a 0.1uf ceramic capacitor (c 1 ). 9 enable enable: h igh - normal operation; low - device is in standby, power down mode 10 st self test: low C normal operation; high C device is in self - test mode 11 nc not connected internally (can be connected to vdd or gnd) 12 gnd ground 13 y output analog output of y - channel. optionally, a capacitor (c 3 ) placed between this pin and ground will form a low pass filter. 14 z output analog output of z - channel. optionally, a capacitor (c 4 ) placed between this pin and ground will form a low pass filter. center pad groun d c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 vmux s 0 s 1 st enable x z y aux in
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 7 of 12 application design equations 1. the bandwidth is determined by the internal 1khz low pass filter. the user can lower the bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. the response is single pole. given a desired b andwidth, f bw , the filter capacitors are determined by: 2. when using not using the multiplexer, the kxr94 is a pin - compatible replacement for kionixs kxm52 series of accelerometers. the following application schematic should be u sed: pin 4 (aux in) = ground pin 5 (vmux) = do not connect pin 6 (s0) = ground pin 7 (s1) = ground 3. when not connecting the self test pin to a digital i/o port of a microcontroller, kionix recommends conn ecting the self test pin to ground. bw f x c c c 6 4 3 2 10 97 . 4 ? ? ? ? c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr 94 vdd c 1 st enable x y z
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 8 of 12 using the multiplexed output of the kxr94 multiplexer data select the kxr94 features an integrated 4 - channel multiplexer. this feature reduces system mcu requirements to only 1 adc and 2 digital i/os. the kxr94 uses two select inputs (s0, s1) to control the data flow from vmux. when a microprocessor toggles the select inputs, the desired output is attained based on the select table. note that logic 0 is gnd and logic 1 is vdd. output select table data sampling rate when operating in its multiplexed mode, the kxr94 has the ability to achieve very high data sampling rates. internally, the sensor elements (x, y, and z) are sequentially sampled in a round robin fashion at a rate of 32k hz per axis. note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. combine this high sensor element sampling rate with the shor t 5 s settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. this is more than sufficient to eliminate any aliasing in the final application since the kxr94 will be operating with a typical bandwidth of ~50hz and a maximum of 1000hz. s1 s0 vmux 0 0 x output 0 1 z output 1 0 y output 1 1 aux. in
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 9 of 12 test specifications ! special characteristics : these characteristics have been identified as being critical to the customer. every part is tested to verify its conformance to specification prior to shipment. table 5. test specifications parameter specification test conditions zero - g offset @ rt 1.4 +/ - 0.042 v 25c, vdd = 2.8 v sensitivity @ rt 560 +/ - 11 mv/g 25c, vdd = 2.8 v current consumption -- operating 500 <= idd <= 1400 ua 25c , vdd = 2.8 v
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 10 of 12 +x +x +y +z +z package dimensions and orientation 5 x 5 x 1.2 mm dfn all dimensions and tolerances conform to asme y14.5m - 1994 dimension mm inch min nom max min nom max a 5.00 0.197 b 5.00 0.197 c 1.10 1.20 1.30 0.043 0.047 0.051 d 0.18 0.23 0.28 0.007 0.009 0.011 e 0.50 0.020 f 0.35 0. 40 0.45 0.014 0.016 0.018 g 3.50 3.60 3.70 0.138 0.142 0.146 h 4.20 4.30 4.40 0.165 0.169 0.173
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 11 of 12 static x/y/z output response versus orientation to earths surface (1g): position 1 2 3 4 5 6 diagram top bottom bottom top x 1.4 v 1.96 v 1.4 v 0.84 v 1.4 v 1.4 v y 1.96 v 1.4 v 0.84 v 1.4 v 1.4 v 1.4 v z 1.4 v 1.4 v 1.4 v 1.4 v 1.96 v 0.84 v x - polarity 0 + 0 - 0 0 y - polarity + 0 - 0 0 0 z - polarity 0 0 0 0 + - (1g) earths surface
2g tri - axis accelerometer specifications part number : kxr94 - 1050 rev. 2 aug - 2010 36 thornwood dr. C ithaca, ny 14850 ? 2010 kionix C all rights rese rved tel: 607 - 257 - 1080 C fax:607 - 257 - 1146 323 - 1672 - 1008100655 www. kionix .com - info@kionix.com page 12 of 12 revision history revision description date 1 initial release 06 - aug - 2007 2 corrected typographic error in table 2 (typical operating voltage changed from 3.3 to 2.8v) 10 - aug - 2010 "kionix" is a registered trademark of kionix, inc. products described herein are protected by patents issued or pending. no license is granted by implication or otherwise under any patent or other rights of kionix. the informatio n contained herein is believed to be accurate and reliable but is not guaranteed. kionix does not assume responsibility for its use or distribution. kionix also reserves the right to change product specifications or discontinue t his product at any time without prior notice. this publication supersedes and replaces all information previously supplied.
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